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PRODID:-//University of California\, Berkeley//UCB Events Calendar//EN 
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DTSTAMP:20080505T180040Z
DTSTART;TZID=America/Los_Angeles:20080509T130000
DTEND;TZID=America/Los_Angeles:20080509T140000
TRANSP:OPAQUE
SUMMARY:Inverse Lithography Technology: Keeping Optics Alive for Another Decade
UID:8774-ucb-events-calendar@berkeley.edu
ORGANIZER;CN="Katalin Voros":mailto:voros@eecs.berkeley.edu
LOCATION:521C (Hogan Room) Cory Hall
DESCRIPTION:This talk will review the challenges faced in advanced lithography processes\,  how ILT is being used to address these challenges\, and show how leading semiconductor manufacturers are moving this technology into mass production.
URL:http://events.berkeley.edu/index.php/calendar/sn/pubaff.html?event_ID=8774&view=preview
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CLASS:PUBLIC
CREATED:20080505T180040Z
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