BSAC Technology Seminar - Dynamic Characterization of MEMS Using Laser Doppler Vibrometry

Seminar | April 11 | 12-1 p.m. | 540 Cory Hall

 Eric Lawrence, MEMS Business Development Manager, Polytec Inc.

 Berkeley Sensor & Actuator Center

Laser Doppler Vibrometry (LDV) is a technology widely used by research institutions for dynamic characterization of MEMS. This technique features microscope-based velocity measurements using the Doppler effect and has unique features in comparison to other available techniques. LDV offers high resolution down to the picometer level, bandwidth to 1.2 GHz, high accuracy, and wide dynamic range. Extension of this technique to full-field scanning allows measurement and display of 3D animations for visualization deflection shapes. Recent developments in this technology extend the usage to 3-axis response and frequency bandwidth to 1.2 GHz. Measurements are presented that exemplify use of this technique for resonator, SAW device, micro mirror array, cantilever beam, and inertial sensor applications.

 Faculty, Staff, Students - Graduate

  RSVP online by April 10

 Sandwiches

 reception@bsac.eecs.berkeley.edu